Screw-type Dry Vacuum Pump Technology and Application in Semiconductor Process

Dry Screw Compressor Performance and Application Range

Screw compressors have the advantage of low mechanical vibration levels similar to those found in centrifugal compressors due their rotary motion. However, screw compressors are positive displacement machines with a working principle similar to reciprocating compressors, which gives screws some advantages compared to centrifugals, such as: • The suction volume flow and power consumption grow li...

Prediction of Vacuum Pump Degradation in Semiconductor Processing

This paper addresses the issue of vacuum pump degradation in semiconductor manufacturing. The ability to identify the current level of vacuum pump degradation and predict the Remaining-Useful-Life (RUL) of a dry vacuum pump would allow manufacturers to schedule pump swaps at convenient times, and reduce the instances of unexpected pump failures, which can incur significant costs. In this paper,...

Screw Compressors for Heat Pump Application

A Case Study of Autoregressive Modelling and Order Selection for a Dry Vacuum Pump

Oil-free dry-vacuum pumps are prevalent in semiconductor plants worldwide today. The popularity of such pumps has grown over the years but little research has been done in the area of condition-monitoring of dry-vacuum pumps. Fault detection of one such pump through the use of AutoRegressive (AR) modelling technique and spectral analysis of vibration and acoustic data has been studied. The test...

Vacuum Gauge to Vacuum Pump Valve